High Purity Aluminum Nitride Ceramic Machined Parts

High Purity Aluminum Nitride Ceramic Machined Parts Characteristics of aluminum nitride ceramics: 1. Excellent thermal conductivity, with a theoretical thermal conductivity of 320W · m-1 · K-1, which is 7-10 times that of alumina and comparable to copper and aluminum metals 2. Excellent mechanical properties, comparable to Al2O3 ceramics in terms of mechanical properties 3. Excellent insulation performance, greater than 15KV/cm 4. Coefficient of thermal expansion matched with silicon and SiC 5. It's not toxic at all. 6. It has good resistance to heat shock. So it can handle sudden changes in temperature well. 7. It can resist plasma erosion. In other words, it won't be easily damaged by plasma.     In semiconductor processing, it's really important to get rid of the heat from silicon wafers. If we can't make sure that the temperature on the surface of the silicon wafer is even all over, then we can't guarantee that the processing will be done even…